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HOME > 기술개발 > 개발제품 > CMP Retainer Ring
개발제품
Techical Report(PEEK)
Conclusion
 PEEK retainer ring and PPS ring were founded no difference applying CMP process (same recipe) while life time
  of Peek were double than PPS one.
 As Intangible effect, cycle of retainer ring replacement decreased by half.
 Cycle of membrane replacement is also extended double due to rebuild at same time with retainer ring,
  so reduced consumption of membrane by half
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